Vacuum Sensors that Fuel Semiconductor Manufacturing

Setra's vacuum sensors help make the manufacturing process of semiconductors cleaner and more efficient, in addition to being capable of measuring extremely small vacuum-pressure ranges. 

Setra's vacuum-pressure manometer series is available in pressure ranges from 1 torr through 1,000 torr, with percent-of-reading accuracy and negligible temperature coefficients across a wide compensated range. In addition, they come in a variety of options such as gas-independence and heated sensors. This speaks to the breadth of our devices' usage, including silicon-wafer manufacturing, sterilization machines or etching processes on a electrical board. 

Industrial Vaccum Sensors

General Thin Film

Vacuum Furnace

LED Sapphire

PE/LPCVD